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Synthesis of thick, uniform, smooth ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor deposition
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2006
Conference Paper
Titel
Synthesis of thick, uniform, smooth ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor deposition
Author(s)
Huang, W.S.
Tran, D.T.
Asmussen, J.
Grotjohn, T.A.
Reinhard, D.
Hauptwerk
Applied Diamond Conference/Nanocarbon 2005. Proceedings
Konferenz
Applied Diamond Conference/Nanocarbon 2005
DOI
10.1016/j.diamond.2005.09.027
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS