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Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
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2006
Conference Paper
Titel
Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
Author(s)
Platzgummer, E.
Biedermann, A.
Langfischer, H.
Eder-Kapl, S.
Kuemmel, M.
Cernusca, S.
Loeschner, H.
Lehrer, C.
Frey, L.
Lugstein, A.
Bertagnolli, E.
Hauptwerk
31st International Conference on Micro- and Nano-Engineering 2005. Proceedings
Konferenz
International Conference on Micro- and Nano-Engineering (MNE) 2005
DOI
10.1016/j.mee.2006.01.140
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB