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Investigation of Uncertainty Sources of Piezoresistive Silicon Based Stress Sensor

: Palczynska, Alicja; Schindler-Saefkow, Florian; Gromala, Przemyslaw; Kreyßig, Kerstin; Rzepka, Sven; Mayer, Dirk; Melz, Tobias


Petz, P.F.:
Uncertainty in mechanical engineering II : Selected, peer reviewed papers from the 2nd International Conference on Uncertainty in Mechanical Engineering (ICUME 2015), November 19-20, 2015, Darmstadt, Germany
Pfaffikon: TTP, 2015 (Applied mechanics and materials 807)
ISBN: 3-03835-652-2
ISBN: 978-3-03835-652-3 (Print)
ISBN: 978-3-03859-448-2 (CD-ROM)
ISBN: 978-3-0357-0133-3 (eBook)
International Conference on Uncertainty in Mechanical Engineering (ICUME) <2, 2015, Darmstadt>
Fraunhofer LBF ()
Fraunhofer ENAS ()
evaluation; Piezoresistive Silicon Stress Sensor

The aim of this paper is to get insight into measurement uncertainties for thermomechanical measurements performed using a piezoresistive silicon-based stress sensor in a standard microelectronic package. All used sensors have the same construction, were produced in the same technological processes at the same time, yet the measurement results show significant distribution. The possible causes for this phenomenon are discussed in this paper. Additionally, Finite Element Method (FEM) model is created and validated, what enables a study of sensitive parameters influencing the measurement uncertainties.