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Development of a scalable nanotube-microbolometer technology

 
: Michel, Marvin D.; Weyers, Sascha; Weiler, Dirk; Geruschke, Thomas; Blaeser, Sebastian; Zakizade, Elahe; Hochschulz, Frank; Vogt, Holger

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SMSI 2020 - Sensor and Measurement Science International : Proceedings, 22-25 June 2020, Nuremberg, Germany, SMSI 2020 is cancelled due to COVID-19
Wunstorf: AMA Service, 2020
ISBN: 978-3-9819376-2-6
ISBN: 978-3-9819376-3-3
ISBN: 3-9819376-3-5
S.165-166
Conference "Sensor and Measurement Science International" (SMSI) <2020, Nuremberg/cancelled>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
FIR-imager; uncooled imager; microbolometer; nanotubes; scalability; QVGA (Quarter Video Graphics Array); infrared focal plane array (IRFPA)

Abstract
Fraunhofer IMS provides a manufacturing process for microbolometer based FIR-imagers (IRFPAs). Beside classical approaches with membranes of microbolometers thermally isolated by lateral legs, Fraunhofer IMS developed a manufacturing process for a thermal isolation realized by nanotubes. This approach benefits the scalability of pixel pitch, because of a pitch-independent thermal isolation. Latest progress in mechanical stability as well as a qualitative characterization of a demonstrator device with 17 μm nanotube-microbolometers on a 17 μm ROIC in QVGA-resolution will be presented.

: http://publica.fraunhofer.de/dokumente/N-596784.html