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CMOS integrated field coils for self-calibration of 3D hall-sensors

: Krause, D.; Stahl-Offergeld, M.; Sand, M.; Hohe, H.-P.; Kovacs, G.

Reindl, L.M. ; Informationstechnische Gesellschaft -ITG-:
Sensoren und Messsysteme : Beiträge der 19. ITG/GMA-Fachtagung 26.-27. Juni 2018 in Nürnberg, CD-ROM
Berlin: VDE-Verlag, 2018 (ITG-Fachbericht 281)
ISBN: 978-3-8007-4683-5
ISBN: 3-8007-4683-2
ISBN: 978-3-8007-4866-2
Fachtagung Sensoren und Messsysteme <19, 2018, Nürnberg>
Fraunhofer IIS ()

An integrated arrangement of field coils for on-chip self-calibration is presented. Routine tests for 3D Hall sensors are very complex and need special test hardware to generate a well-defined three-dimensional magnetic field. In combination with a high voltage current source, the integrated arrangement allows the generation of local magnetic fields up to 2 mT. In spite of process variations, the error of each coil's magnetic flux density is less than 1%. Magnetic tests can be done on-chip without need for additional external test equipment. Additionally, a low power mode allows for validity checks and online calibrations during measurements with a small magnetic flux density of 0.2 mT.