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Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication

: Schellenberger, M.; Anger, S.; Pfeffer, M.; Häublein, V.; Roeder, G.; Bauer, A.

Volltext ()

Keil, S.:
Digital Transformation in Semiconductor Manufacturing : Proceedings of the 1st and 2nd European Advances in Digital Transformation Conference, EADTC 2018, Zittau, Germany and EADTC 2019, Milan, Italy
Cham: Springer Nature, 2020 (Lecture notes in electrical engineering 670)
ISBN: 978-3-030-48601-3 (Print)
ISBN: 978-3-030-48602-0 (Online)
European Advances in Digital Transformation Conference (EADTC) <1, 2018, Zittau>
European Advances in Digital Transformation Conference (EADTC) <2, 2019, Milan>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IISB ()

Fraunhofer IISB offers prototyping services for electron devices. Such prototyping builds on proven processes and designs, amending them with customer-specific specifications and additions. The challenge is to efficiently combine existing expertise and proven process/device modules with “on the fly” R&D results and novel findings. In this paper, we present a first solution approach for a smart platform for rapid prototyping in order to improve time-to-market in low-volume device fabrication. This solution covers research of a digital twin for optimized management of wafer containers, development of intelligent algorithms for process and equipment control as well as a novel approach for “smart experiments” to achieve an accelerated transfer of process development to ISO-certified production.