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Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging

 
: Mikulik, P.; Lübbert, D.; Pernot, P.; Helfen, L.; Baumbach, T.

:

Servet, B. ; European Materials Research Society -EMRS-:
E-MRS 2005 Spring Meeting. Symposium P: Current trends in optical and X-ray metrology of advanced materials for nanoscale devices. Proceedings : Strasbourg, France, 31 May-03 June 2005
Amsterdam: Elsevier, 2006 (Applied surface science 253.2006, Nr.1)
S.188-193
Symposium P "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices <2005, Strasbourg>
European Materials Research Society (Spring Meeting) <2005, Strasbourg>
Englisch
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

: http://publica.fraunhofer.de/dokumente/N-59601.html