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Laser-lithography on non-planar surfaces

: Radtke, D.; Zeitner, U.D.

Postprint (671 KByte; PDF; )

Optics Express 15 (2007), Nr.3, S.1167-1174
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()

An extensively modified laser-lithography system specially developed for realization of micro-optical profiles on non-planar surfaces is presented. This extended system offers new possibilities of fabricating micro-optical elements without the technology related restriction of surface shape that existed so far. A diffractive lens on a convex spherical substrate is designed and fabricated as an example for hybrid achromatic refractive-diffractive elements to demonstrate the functionality of the system and the wide range of possible new applications.