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Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al₀.₇₇Sc₀.₂₃N (1120) thin films

 
: Ding, Anli; Kirste, Lutz; Lu, Yuan; Driad, Rachid; Kurz, Nicolas; Lebedev, Vadim; Christoph, Tim; Feil, Niclas M.; Lozar, Roger; Metzger, Thomas; Ambacher, Oliver; Zukauskaite, Agne

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Volltext urn:nbn:de:0011-n-5895906 (1.5 MByte PDF)
MD5 Fingerprint: dd5431b78b4e33510e00cd2a2cb9f07c
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Erstellt am: 13.5.2020


Applied Physics Letters 116 (2020), Nr.10, Art. 101903, 6 S.
ISSN: 0003-6951 (Print)
ISSN: 1077-3118
Englisch
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IAF ()

Abstract
Non-polar a-plane Al₀.₇₇Sc₀.₂₃N(1120)thin films were prepared by magnetron sputter epitaxy on r-plane Al₂O₃ (1102) substrates. Different substrate off-cut angles were compared, and the off-cut angle of 3 resulted in the best structural quality of the AlScN layer. Structural characterization by x-ray diffraction confirmed that single phase, wurtzite-type, a-plane AlScN (1120), surface acoustic wave resonators were fabricated with wavelengths λ = 2–10 lm (central frequency up to 1.7 GHz) with two orthogonal in-plane propagation directions. A strong dependence of electromechanical coupling on the in-plane orientation was observed. Compared to conventional c-plane AlScN based resonators, an increase of 185–1000% in the effective electromechanical coupling was achieved with only a fractional decrease of <10.5% in series resonance frequency.

: http://publica.fraunhofer.de/dokumente/N-589590.html