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Integrated Microsystems for Smart Applications

: Otto, T.; Kurth, S.; Voigt, S.; Morschhauser, A.; Meinig, M.; Hiller, K.; Martin, J.; Vogel, M.


Sensors and Materials : S and M 30 (2018), Nr.4, S.767-778
ISSN: 0914-4935
Fraunhofer ENAS ()

ore and more smart components and smart integrated systems enter into diverse innovative products and applications. They are key components and key technologies for industry 4.0 as well as Internet of Things and services. The application areas include not only smartphones with advanced functionalities but also monitoring systems for sustainable production, smart agriculture, smart grid, and smart home as well as support systems for senior citizens to guarantee their more independent lifestyle. In this paper we describe different prototype developments. The main focus is on the systems of Fraunhofer Institute for Electronic Nano Systems ENAS (Fraunhofer ENAS) and the Center for Microtechnologies (ZfM) at Chemnitz University of Technology. The application fields of the prototypes are smart health, smart energy, and smart production.