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Light Scattering Techniques for the Inspection of Microcomponents and Structures

: Duparre, A.; Schröder, S.

Osten, W.:
Optical Inspection of Microsystems. Second Edition
Boca Raton, Fla.: CRC Press, 2019
ISBN: 978-1-4987-7947-0
ISBN: 9780429186738
ISBN: 978-1-4987-7950-0
Aufsatz in Buch
Fraunhofer IOF ()

Ever-increasing surface quality requirements call for advanced, highly sensitive as well as noncontact and area-covering inspection tools. Light-scattering techniques have become widely recognized to fulfil these demands. This chapter describes how a large variety of surface quality-relevant effects such as micro- and nanostructures, roughness, defects, and coating inhomogeneities can be advantageously inspected through light-scattering measurements.
Following a brief outline of the theoretical basics on roughness-induced light scattering, main scattering measurement principles suitable for a wide range of applications, extending from supersmooth optical surfaces to microcomponent and microstructure components, are described. Standardization for total and angle-resolved light-scattering measurements, as well as general aspects and examples on how to combine light-scattering techniques with profilometric methods, are discussed.