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2014
Conference Paper
Titel
Laser micromachining of brittle and fragile functional materials
Abstract
The paper presents the possibilities and challenges of Laser structuring of brittle and fragile functional materials like glass, piezo-/pyroelectric ceramics and crystals and silicon with an ultrashort pulse laser. With the help of a selection of distinct examples, an overview is given and it can be demonstrated, that there are some limitations concerning processing dimensions and material properties that needs to be considered.