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Laser micromachining of brittle and fragile functional materials

 
: Enderlein, T.; Nestler, J.; Otto, T.; Gessner, T.

Gessner, T.:
Smart Systems Integration 2014 : Wien/Österreich, 26.3.2014 - 27.3.2014; 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Aachen: Apprimus-Verlag, 2014
ISBN: 978-3-86359-201-1
S.467-470
Smart Systems Integration Conference (SSI) <2014, Vienna>
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <8, 2014, Vienna>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
The paper presents the possibilities and challenges of Laser structuring of brittle and fragile functional materials like glass, piezo-/pyroelectric ceramics and crystals and silicon with an ultrashort pulse laser. With the help of a selection of distinct examples, an overview is given and it can be demonstrated, that there are some limitations concerning processing dimensions and material properties that needs to be considered.

: http://publica.fraunhofer.de/dokumente/N-578577.html