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Compact driver module for closed-loop control of resonant 2D-MOEMS scanners

 
: Tortschanoff, A.; Kenda, A.; Sandner, T.; Kremer, M.; Frank, A.

Gessner, T.:
Smart Systems Integration 2014 : Wien/Österreich, 26.3.2014 - 27.3.2014; 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Aachen: Apprimus-Verlag, 2014
ISBN: 978-3-86359-201-1
S.583-586
Smart Systems Integration Conference (SSI) <2014, Vienna>
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <8, 2014, Vienna>
Englisch
Konferenzbeitrag
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/dokumente/N-578571.html