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Multi-sensor system for real-time monitoring of laser micro-structuring

 
: Zuric, Milena; Nottrodt, Oliver; Abels, Peter

Japan Laser Processing Society -JLPS-:
8th International Congress on Laser Advanced Materials Processing, LAMP 2019 : 2019-05-21 - 2019-05-24, Hiroshima, Japan
Hiroshima: JLPS, 2019
Paper 19-022
International Congress on Laser Advanced Materials Processing (LAMP) <8, 2019, Hiroshima>
Englisch
Konferenzbeitrag
Fraunhofer ILT ()
real-time monitoring; online process monitoring; ultrashort pulse laser structuring; laser micromachining

: http://publica.fraunhofer.de/dokumente/N-575151.html