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  4. Terahertz Inspection of the Joining Quality of Industrial Silicon Carbide Ceramics
 
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2019
Conference Paper
Title

Terahertz Inspection of the Joining Quality of Industrial Silicon Carbide Ceramics

Abstract
We present in our contribution first investigations towards quality inspection of joining interfaces of silicon carbide (SiC) and silicon nitride (SiN) ceramics for industrial applications. In time-domain spectroscopy (TDS) terahertz transmission measurements, we find significant transmission through relevant SiC and SiN samples, mainly in correlation with the sample's resistivities. Differences in resistivity at the interfaces of joined ceramics could therefore be used for the evaluation of the quality of these joinings. Images of an examplary joined SiC component with an artificial inner structure were recorded with an allelectronic, frequency-modulated continuous wave (FMCW) terahertz radar at 100 GHz in a reflection geometry. The images clearly reveal the inner structure of the component at the depth of the joining interface. Based on these first findings, further studies on quality inspection of SiC joinings are being carried out.
Author(s)
Bauer, Maris  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Döring, Michael
FCT Ingenieurkeramik GmbH, DE-96528, Frankenblick
Degenhardt, Ulrich
FCT Ingenieurkeramik GmbH, DE-96528, Frankenblick
Friederich, Fabian  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Mainwork
44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019  
Conference
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) 2019  
DOI
10.1109/IRMMW-THz.2019.8873736
Language
English
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Keyword(s)
  • ceramics

  • CW radar

  • elemental semiconductors

  • FM radar

  • inspection

  • silicon

  • silicon compounds

  • submillimetre wave imaging

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