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CMUT with mechanically coupled plate actuators - Linearized electrostatic modeling

: Krenkel, Marcel; Koch, Sandro; Kupnik, M.


Cochran, Sandy (General Co-Chair) ; Institute of Electrical and Electronics Engineers -IEEE-; IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society:
IEEE International Ultrasonics Symposium, IUS 2019 : October 6 - 9, 2019, Glasgow, Scotland
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-7281-4595-2
ISBN: 978-1-7281-4596-9
ISBN: 978-1-7281-4597-6
International Ultrasonics Symposium (IUS) <2019, Glasgow>
Fraunhofer IPMS ()

This paper derives an analytical model of the electrostatic transduction of a capacitive micromachined ultrasonic transducer (CMUT) with mechanically coupled plate actuators. The mass of the coupling geometry significantly affects the dynamic deflection shape of the plate actuators. As the electrostatic transduction of a CMUT depends on the distance between both electrodes of these capacitive systems, the static and dynamic deflection shapes are taken into account for the small signal electrostatic behavior. The analysis of the electrostatic lumped elements, varying with the bias voltage, reveals a dependence on the deflection shape. A comparison with finite element simulations shows good agreement with the analytical model.