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Nanostructured al SWG Reflectors on thin LP-Si3N4 membranes as (TiO2/SiO2)³ Bragg reflector alternative for VIS Fabry-Pérot Interferometers

: Helke, C.; Hiller, K.; Seiler, J.; Erben, J.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Otto, T.


Institute of Electrical and Electronics Engineers -IEEE-:
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, TRANSDUCERS & EUROSENSORS 2019 : 23-27 June 2019, Berlin, Germany
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-5386-8104-6
ISBN: 978-1-5386-8105-3
ISBN: 978-1-7281-2007-2
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <20, 2019, Berlin>
European Conference on Solid-State Transducers (Eurosensors) <33, 2019, Berlin>
Fraunhofer ENAS ()

This contribution presents a Fabry-Pérot Interferometer (FPI) for the visible spectral range from 555 nm to 585 nm. Two approaches for the FPI reflectors are investigated: a (TiO 2 /PE-SiO 2 ) 3 Bragg reflector consisting of 55 nm TiO 2 and 97 nm PE-SiO 2 layers on 210 nm thin LP-Si 3 N 4 membranes as well as a 50 nm thin Al subwavelength grating (SWG) reflector with 140 nm structure dimension and 200 nm structure pitch on 150 nm thin LP-Si 3 N 4 membranes. Reflectance is up to 97 % realizing an FPI with peak transmittance up to 40 %, a full width half maximum (FWHM) bandwidth of 1.8 nm and a free spectral range (FSR) of 30 nm.