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Next Generation of highly miniaturized Bulk-MEMS Fabry-Pérot Filters for infrared Microspectrometers

 
: Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Seiler, J.; Helke, C.; Meinig, M.; Kurth, S.

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Institute of Electrical and Electronics Engineers -IEEE-:
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, TRANSDUCERS & EUROSENSORS 2019 : 23-27 June 2019, Berlin, Germany
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-5386-8104-6
ISBN: 978-1-5386-8105-3
ISBN: 978-1-7281-2007-2
S.470-473
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <20, 2019, Berlin>
European Conference on Solid-State Transducers (Eurosensors) <33, 2019, Berlin>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
This paper reports on the progress in miniaturization of bulk micromachined FP filters and tunable detector modules for the mid infrared. The chip size was reduced from 7×7 mm 2 to 5×5 mm 2 , enabling integration into TO5-size detector packages, which is about only one quarter of the formerly used TO8. At the same time a high optical throughput is maintained. A MEMS design with two movable reflectors is used, which allows for lower actuation voltages and provides negligible acceleration sensitivity.

: http://publica.fraunhofer.de/dokumente/N-565809.html