Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Plasma-activated direct bonding of coated optical glasses

 
: Birckigt, P.; Rothhardt, C.; Grabowski, K.; Jorke, K.; Schlegel, R.; Dreisow, F.; Kalkowski, G.; Risse, S.; Eberhardt, R.

:

6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019. Proceedings : 21-25 May 2019, Kanazawa, Ishikawa, Japan
Piscataway, NJ: IEEE, 2019
ISBN: 978-4-904743-07-2
ISBN: 978-1-72810-387-7
S.71
International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) <6, 2019, Kanazawa>
Bundesministerium fur Wirtschaft und Energie BMWi (Deutschland)
18360
Englisch
Konferenzbeitrag
Fraunhofer IOF ()

Abstract
For spectrometric applications in space the benefits of direct bonding are highly promising. However, direct bonding of optical coatings is still challenging. This work presents investigations on plasma-activated direct bonding of optical glasses without and with added optical coatings. Gained technologies will be used for novel coated prism spectrometers.

: http://publica.fraunhofer.de/dokumente/N-565592.html