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Target materials for efficient plasma-based extreme ultraviolet sources in the range of 6 to 8 nm

 
: Wezyk, Alexander von; Andrianov, Konstantin; Wilhein, Thomas; Bergmann, Klaus

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Volltext ()

Journal of Physics. D. Applied Physics 52 (2019), Nr.50, Art. 505202, 9 S.
ISSN: 0022-3727
ISSN: 1361-6463
Englisch
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer ILT ()
extreme ultraviolet source; laser produced plasma

Abstract
In a comparative study the extreme ultraviolet (XUV) emission of laser-produced plasmas(LPP) of gadolinium (Gd), terbium (Tb), aluminum (Al), magnesium (Mg) and a magnesium–copper–gadolinium alloy (Mg65–Cu25–Gd10) targets is investigated in order to benchmark the emission potential at a wavelength of around 6.7 nm. Compared to the Gd/Tb targets, the advantage of the alloy is a reduced melting point of Tm < 500 °C which leads to the option of a liquid or droplet target system as is usually used for a regenerative target concept. Theoretical considerations are presented to compare the emission potential of the four targets in direct comparison. Experimental results of the LPP are discussed with respect to the 6.x nm inband energy, which are consistent with the theoretical considerations. It is shown that the line radiators Al and Mg seem to be suitable emitters with comparable brightness to Gd- or Tb-based sources. The measured conversion efficiency of the Mg65Cu25Gd10 target reaches80% of that of the pure Gd LPP although the Gd fraction is only 2% (atom percent).

: http://publica.fraunhofer.de/dokumente/N-565156.html