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High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing

: Barthels, Thilo Alexander; Reininghaus, Martin; Westergerling, Holger


Dudley, Angela (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser Beam Shaping XIX : 11-12 August 2019, San Diego, California
Bellingham, WA: SPIE, 2019 (Proceedings of SPIE 11107)
ISBN: 978-1-5106-2907-3
ISBN: 978-1-5106-2908-0
Paper 111070K, 11 S.
Conference "Laser Beam Shaping" <19, 2019, San Diego/Calif.>
Fraunhofer ILT ()
multibeam; multibeamscanner; ultrashort pulsed laser; ablation threshold; micro structuring

High precision multibeam processing is a useful approach to increase the productivity of high precision laser material processing by means of ultrashort pulsed (USP) laser radiation. In the field of micro- and nanostructuring multibeam ultrashort pulsed laser processing attracts increasing attention due to its ability to generate periodic pattern like filters within an economically reasonable time of up to 12.000 holes/sec. Thus, this technology has become relevant for applications in the filtration industry and biotech industry. The developed multibeamscanner (MBS) is capable of drilling holes with extremely small outlet diameters (< 1μm) into various materials with a customized arrangement and a density of more than 10.000 holes per mm². The aim is to investigate how the exit diameter of single-digit sized holes can be further reduced using the multibeamscanner and whether an increase in productivity is possible.