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Novel High Reliable Si-Based Trace Humidity Sensor Array for Aerospace and Process Industry

 
: Zhou, S.Y.; Mukhopadhyay, B.; Mackowiak, P.; Ehrmann, O.; Kröhnert, K.; Gernhardt, R.; Lang, K.D.; Woratz, M.; Herrmann, P.; Volkmer, N.; Pohl, O.; Noack, V.; Ngo, H.D.

Yurish, S.Y.:
Sensors and Electronic Instrumentation Advances, SEIA '16 : Proceedings of the 2nd International Conference on Sensors and Electronic Instrumentation Advances, 22-23 September 2016, Barcelona, Castelldefels, Spain
Barcelona: IFSA Publishing, 2016
ISBN: 978-84-608-9963-1
S.100-103
International Conference on Sensors and Electronic Instrumentation Advances (SEIA) <2, 2016, Barcelona>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

Abstract
In this paper we present high reliable and accurate silicon-based trace humidity sensors for use in aerospace and process industry. The sensors have been realized by using simple MEMS technology in this work. One is a single sensor (sensor cell) for monitoring of humidity, and sensor array is able to measure the total trace humidity in the atmosphere. It's very suitable for aerospace and process industry such pharmacy applications.

: http://publica.fraunhofer.de/dokumente/N-564692.html