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A piezoelectric flexural plate wave (FPW) Bio-MEMS sensor with improved molecular mass detection for point-of-care diagnostics

: Walk, Christian; Wiemann, Matthias; Görtz, Michael; Weidenmüller, Jens; Jupe, Andreas; Seidl, Karsten


Current directions in biomedical engineering 5 (2019), Nr.1, S.265-268
ISSN: 2364-5504
European Commission EC
H2020; 634415; PoC-ID
Platform for ultra-sensitive Point-of-Care diagnostics for Infectious Diseases
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Fraunhofer IMS ()
flexural plate wave (FPW); Bio-MEMS; point of care (POC); multiplexing; respiratory syncytial virus (RSV)

A piezoelectric FPW-sensor has been developed for a point of care device in this work. The Bio- MEMS FPW-sensor consists of an electrode configuration termed as an interdigital transducer (IDT) placed on a membrane. An input IDT excites and an output IDT detects the propagating acoustic waves through a PZT layer. Design optimizations and fabrication improvements of the FPW-sensor led to significantly reduced attenuation of the wave signal and the damping of the propagating waves between the IDTs. The working principle of mass loading is shown using different low-viscous liquids. A density dependent sensitivity of -0.39 MHz/g/cm³ was evaluated. After the membrane was functionalized, the Bio-MEMS FPW-sensor was used to measure a specific chemokine in complex solution. By design improvements, the resolution was significantly increased from 0.7 Hz/nM to 14 Hz/nM.