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Miniature integrated micro-spectrometer array for snap shot multispectral sensing

: Danz, N.; Höfer, B.; Förster, E.; Flügel-Paul, T.; Harzendorf, T.; Dannberg, P.; Leitel, R.; Kleinle, S.; Brunner, R.

Volltext ()

Optics Express 27 (2019), Nr.4, S.5719-5728
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()

An array of micro spectrometers for parallel spectral sensing is designed, set up and tested. It utilizes a planar prism grating combination to obtain an almost linear optical system of 6 mm length only. Arranging such micro spectrometers in an array configuration yields 2’000 spectrometers when utilizing a common 4/3” CCD image sensor well adapted to e.g. microscopic image dimensions. The application in microscopic imaging in the 450-900 nm spectral range is demonstrated as proof of concept, which can be adapted to massively parallel sensing in the frame of integrated sensor concepts.