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Iron(III) β-diketonates: CVD precursors for iron oxide film formation

: Pousaneh, E.; Korb, M.; Assim, K.; Rüffer, T.; Dzhagan, V.; Noll, J.; Zahn, D.R.T.; Schulz, S.E.; Lang, H.


Inorganica Chimica Acta 487 (2019), S.1-8
ISSN: 0020-1693
Fraunhofer ENAS ()

Complexes [Fe(β-diketonate)3] (β-diketonate = 2-acetylcyclopentanoate (3a), = 2-acetylcyclohexanoate (3b), = 4,4-dimethyl-1-phenyl pentanedionate (3c)) were synthesized by the reaction of FeCl3 with the respective β-diketones in presence of NaOH. The molecular structures of 3a and 3c in the solid state are discussed, confirming an octahedral coordination sphere at Fe(III) setup by the three bidentate-bonded β-diketonato ligands. Variation of the β-diketonato ligands allowed to influence the thermal behavior and vapor pressure of the complexes. TG-MS ( = Thermo Gravimetry-Mass Spectrometry) studies, exemplarily carried out on 3a, confirmed the release of the β-diketonate ligands. Complexes 3a–c were applied as MOCVD (=Metal-Organic Chemical Vapor Deposition) precursors for the deposition of Fe2O3 thin films on silicon substrates. It was found that with 3a,b, conformal and dense carbon-free γ- and α-Fe2O3 layers were produced at 450 °C, which was verified by scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray photon spectroscopy.