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Transfer of Run-to-Run-Control to Production Control Level in Semiconductor Front-End

: Bauer, Dennis; Maier, Florian; Schlereth, Andreas

Präsentation urn:nbn:de:0011-n-5460646 (1.1 MByte PDF)
MD5 Fingerprint: acb8c9ba84776148657dc67309e4c90a
Erstellt am: 22.5.2019

Zenodo. Online resource (2019), 19 Folien
European Advanced Process Control and Manufacturing Conference (APCM) <19, 2019, Villach>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPA ()
dispatching; Regelkreis; Produktionssteuerung

Supply chain disruptions with an unpredictable occurrence such as significant differences between forecasts and actual customer demands are challenging for semiconductor manufacturers. Normally, these events are responded to with a time-consuming mostly manual procedure. This work describes an approach for an automated framework to react faster and with less effort on these unpredictable events. Therefore, an approach based on run-to-run-control has been developed establishing a closed-loop control between supply chain and production control. As a result of this approach, safety stocks can be reduced due to a more accurate cycle time prediction and a reduced number of false alarms regarding supply chain disruptions.