Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Defect examination of diamond crystals by surface hydrogen-plasma etching

 
: Jiang, X.; Rickers, C.

:

Applied Physics Letters 75 (1999), Nr.25, S.3935-3937
ISSN: 0003-6951
ISSN: 1077-3118
Englisch
Zeitschriftenaufsatz
Fraunhofer IST ()
CVD diamond; thin film

Abstract
A method to examine the defects and defect distribution in diamond crystals has been developed. To make the crystal defects visible, a high-temperature hydrogen-plasma etching was employed. By a combination of scanning electron microscopy and atomic force microscopy, the etch pits of the (001) diamond faces parallel to the substrate were observed and analyzed. The defect distribution of chemical-vapor-deposited diamond crystallites corresponds exactly with that observed by transmission electron microscopy, and can be related to the growth mode during film deposition.

: http://publica.fraunhofer.de/dokumente/N-546.html