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2018
Journal Article
Titel
Fast cross-linking-characterization of waveguide-polymers on wafers by imaging low-coherence interferometry
Abstract
This work introduces a novel method to characterize cross-linking differences in spincast polymers for waveguide applications. The method is based on a low-coherence interferometer which utilizes an imaging spectrometer to gather spatially resolved data along a line without the need for scanning. The cross-linking characterization is performed by the determination of the wavelength-dependent optical thickness. In order to do this, an algorithm to analyze the wrapped phase data and extract refractive index information is developed. Finally, the approach is tested on photo-lithographically produced samples with lateral refractive index differences in pitches of 50 mm.
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