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Fast cross-linking-characterization of waveguide-polymers on wafers by imaging low-coherence interferometry

: Taudt, Christopher; Nelsen, Bryan; Schlögl, Sandra; Koch, Edmund; Hartmann, Peter

Volltext ()

Proceedings. MDPI AG 2 (2018), Nr.13, Art. 1046, 5 S.
ISSN: 2504-3900
Eurosensors Conference <32, 2018, Graz>
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer IWS ()
interferometry; cross-linking characterization; white-light interferometry; dispersion enhanced low-coherence interferometry; photoresist; semiconductor manufacturing

This work introduces a novel method to characterize cross-linking differences in spincast polymers for waveguide applications. The method is based on a low-coherence interferometer which utilizes an imaging spectrometer to gather spatially resolved data along a line without the need for scanning. The cross-linking characterization is performed by the determination of the wavelength-dependent optical thickness. In order to do this, an algorithm to analyze the wrapped phase data and extract refractive index information is developed. Finally, the approach is tested on photo-lithographically produced samples with lateral refractive index differences in pitches of 50 μm.