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Development of titanium oxide conformal thin film by atomic layer deposition

Poster presented at 11th International Workshop on Engineering of Functional Interfaces, EnFI 2018, July 01 - July 03, 2018, Wittenberg, Germany
 
: Mohammadian Kia, Alireza

2018, 1 Folie
International Workshop on Engineering of Functional Interfaces (EnFI) <11, 2018, Wittenberg>
Fraunhofer-Gesellschaft FhG
600938; ZePowEl
Englisch
Poster
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/dokumente/N-531699.html