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2018
Poster
Titel
Development of titanium oxide conformal thin film by atomic layer deposition
Titel Supplements
Poster presented at 11th International Workshop on Engineering of Functional Interfaces, EnFI 2018, July 01 - July 03, 2018, Wittenberg, Germany
Project(s)
ZePowEl
Funder
Fraunhofer-Gesellschaft FhG