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Method for fabricating an electro-absorption modulated laser and electro-absorption modulated laser

 
: Dolores Calzadilla, Victor; Möhrle, Martin; Soares, Francisco; Zander, Marlene

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Frontpage ()

WO 2018091094 A1: 20161117
Englisch
Patent, Elektronische Publikation
Fraunhofer HHI ()

Abstract
The invention relates to a method for fabricating an electroabsorption modulated laser (1), comprising generating a single mode laser section (11) and an electroabsorption modulator section (12), comprising fabricating at least one n-doped layer (111) of the laser section (11) and at least one n-doped layer (121) of the modulator section (12); generating an isolating section (13) for electrically isolating at least the n-doped layer (111) of the laser section (11) and the n-doped layer (112) of the modulator section (12) from one another. According to the invention, generating the isolating section (13) comprises epitaxially growing at least one isolating layer (131, 132) and structuring the isolating layer (131, 132) before the generation of the n-doped layer (111) of the laser section (11) and the n-doped layer (121) of the modulator section (12). The invention also relates to an electroabsorption modulated laser.

: http://publica.fraunhofer.de/dokumente/N-530815.html