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Analysis and simulation of super-hydrophobic layers for micro-fluidic applications

 
: Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger

Mikro-Nano-Integration. Beiträge des 7. GMM-Workshops 2018. CD-ROM : 22.-23. Oktober 2018, Dortmund
Berlin: VDE-Verlag, 2018 (GMM-Fachbericht 92)
ISBN: 978-3-8007-4789-4
S.33-37
Workshop Mikro-Nano-Integration <7, 2018, Dortmund>
Deutsche Forschungsgemeinschaft DFG
VO 802/4-1; EWALD
Elektrobenetzung mit Atomlagenabscheidung
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
electrowetting-on-dielectric (EWOD); atomic layer deposition (ALD); microstructured surface; wetting behaviour

Abstract
In this work, super-hydrophobic coatings are investigated for drop transport with electrowetting-on-dielectric (EWOD). At first, the basics of EWOD are shown. Then the impact of decreasing the thickness of the dielectric layer and using super-hydrophobic coatings on the actuation voltage Vmin for drop transport is presented. In the last part, simulation results made with COMSOL Multiphysics Ⓡ are shown and the results are discussed.

: http://publica.fraunhofer.de/dokumente/N-528050.html