
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Calibrated reference standards for films in the nanometer range
Abstract
The paper refers to the development, manufacture and metrological evaluation of artifacts for the thickness of an ultra-thin film deposited on a substrate. The artifacts shall be applicable as metrological reference standards for the calibration of film thickness measurement systems like X-ray reflectometers or ellipsometers. This calibration shall contribute to consistent traceable measurement results.