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Characterization of low temperature Cu/In bonding for fine-pitch interconnects in three-dimensional integration

: Panchenko, I.; Bickel, S.; Meyer, J.; Mueller, M.; Wolf, J.M.


Japanese journal of applied physics 57 (2018), Nr.2S1, Art. 02BC05, 7 S.
ISSN: 0021-4922
ISSN: 1347-4065
International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) <5, 2017, Tokyo>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IZM ()

This study presents the results for Cu/In bonding based on the solid–liquid interdiffusion (SLID) principle for fine-pitch interconnects in three-dimensional integration. The microbumps were fabricated on Si wafers (55 µm pitch, 25 µm top bump diameter, 35 µm bottom bump diameter). In was electroplated directly on Cu only on the top die microbumps. Two different In thicknesses were manufactured (3 and 5 µm). The interconnects were successfully fabricated at a bonding temperature of 170 °C. High temperature storage was carried out at 150 and 200 °C for different times between 2 and 72 h directly after the interconnect formation in order to investigate the temperature stability. The microstructure was analyzed by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). The intermetallic compound (IMC) found in the microbumps after electroplating was CuIn2. The intermetallic interlayer consists of Cu11In9 and a thin layer of Cu2In after bonding and isothermal storage.