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Angular resolved power spectral density analysis for improving mirror manufacturing

: Pertermann, T.; Hartung, J.; Beier, M.; Trost, M.; Schröder, S.; Risse, S.; Eberhardt, R.; Tünnermann, A.; Gross, H.


Applied optics 57 (2018), Nr.29, S.8692-8698
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Fraunhofer IOF ()

Ultra-precise diamond turning is the method of choice for manufacturing freeform optics. Analyzing surface errors in different spatial frequency ranges has mainly been performed in a one-dimensional representation of the power spectral density function. However, the advanced machine dynamics at the fabrication of freeform mirrors result in highly anisotropic surfaces with regular ripples in different orientations. To properly analyze the entire surface in the frequency regime, a new way of representing the two-dimensional power spectral density is introduced in this paper. This novel tool is utilized for the evaluation of an example freeform mirror.