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Development of 4 nm-Thin PECVD aluminium oxide using plasma analysis and its application to PERC solar cells and modules

 
: Hofmann, Marc; Wagenmann, Dirk; Teßmann, Christopher; Jäcklein, Martin; Saint-Cast, Pierre; Eberlein, Dirk; Kraft, Achim; Dippell, T.; May, F.; Dörr, M.; Cord, B.; Schütte, T.; Neiß, P.; Eichhorn, L.; Klick, M.; Richter, U.; Siemens, M.; Wiedemuth, P.

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Volltext urn:nbn:de:0011-n-5214515 (516 KByte PDF)
MD5 Fingerprint: f4fad5ae9250d57c2e7a4a2be2fb17f7
Erstellt am: 6.12.2018


Verlinden, P. ; WIP - Renewable Energies, München:
35th European Photovoltaic Solar Energy Conference and Exhibition 2018 : Proceedings of the international conference held in Brussels, Belgium, 24 September-28 September 2018; DVD-ROM
München: WIP, 2018
ISBN: 978-3-936338-50-8
ISBN: 3-936338-50-7
S.385-389
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <35, 2018, Brussels>
Bundesministerium für Wirtschaft und Energie BMWi
0325754D; SIMPLEX
Hocheffiziente Vakuumbeschichtungen von passivierenden Schichtsystemen auf c-Si Solarzellen, Teilprojekte: PECVD-Prozesse, Herstellung und Charakterisierung
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()
Fraunhofer IST ()
passivation; PECVD; AlOx; plasma monitoring; PERC

Abstract
Very thin aluminum oxide passivation films (3.7 nm) are developed using ICP PECVD and applying plasma simulation (particle-in-cell Monte Carlo method), in-situ plasma characterization (spectroscopic plasma monitoring, self-excited electron plasma resonance spectroscopy, laser ellipsometry) and ex-situ layer analysis (lifetime and density of interface traps investigation). The thin (3.7 nm) AlOx films are applied to PERC-type solar cells reaching 21% efficiency slightly outperforming solar cells applying standard 15 nm AlOx layers. All solar modules manufactured applying the 3.7 nm thin AlOx passivation layer successfully passed standard damp-heat and thermal-cycling tests proving the applicability of the novel technology.

: http://publica.fraunhofer.de/dokumente/N-521451.html