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High resolution ptychographic coherent diffractive imaging using table-top XUV sources

: Eschen, W.; Tadesse, G.K.; Klas, R.; Tschernajew, M.; Tuitje, F.; Spielmann, C.; Tünnermann, A.; Limpert, J.; Rothhardt, J.


Optical Society of America -OSA-, Washington/D.C.:
3D Image Acquisition and Display: Technology, Perception and Applications : Part of Imaging and Applied Optics Congress; 25-28 June 2018, Orlando, Florida, United States
Washington, DC: OSA, 2018
ISBN: 978-1-943580-44-6
Paper JM3E.4
Conference "3D Image Acquisition and Display - Technology, Perception and Applications" <2018, Orlando/Fla.>
Imaging and Applied Optics Congress <2018, Orlando/Fla.>
Fraunhofer IOF ()

We present a coherent imaging setup for extended samples achieving record-high resolution for non-periodic samples. A Siemens star pattern is imaged and the Rayleigh criterion is used to provide a reliable sub-50 nm resolution claim.