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Progress on carbon nanotube BEOL interconnects

: Uhlig, B.; Liang, J.; Lee, J.; Ramos, R.; Dhavamani, A.; Nagy, N.; Dijon, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Millar, C.; Konemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.


Madsen, J. ; European Design Automation Association -EDAA-; Institute of Electrical and Electronics Engineers -IEEE-, Council on Electronic Design Automation; European Electronic Chips & Systems design Initiative -ECSI-, Gieres; Association for Computing Machinery -ACM-, Special Interest Group on Design Automation -SIGDA-:
Design, Automation & Test in Europe, DATE 2018. Proceedings : 19-23 March 2018, Dresden, Germany
Piscataway, NJ: IEEE, 2018
ISBN: 978-3-9819263-0-9
ISBN: 978-3-9819263-1-6
Design, Automation & Test in Europe Conference & Exhibition (DATE) <21, 2018, Dresden>
Fraunhofer IPMS ()

This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process & growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level bench-marking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.