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Special arc modes with reduced macroparticle emission

 
: Schultrich, Bernd

:

Schultrich, Bernd:
Tetrahedrally Bonded Amorphous Carbon Films I : Basics, Structure and Preparation
Berlin: Springer, 2018 (Springer series in materials science 263)
ISBN: 978-3-662-55925-3 (Print)
ISBN: 978-3-662-55927-7 (Online)
DOI: 10.1007/978-3-662-55927-7
S.527-543
Englisch
Aufsatz in Buch
Fraunhofer IWS ()

Abstract
A promising way towards arc deposited carbon films of higher perfectness consists in the reduction or even complete suppression of the macroparticle emission in addition to or instead of their troublesome separation.

: http://publica.fraunhofer.de/dokumente/N-519484.html