Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Vacuum arc discharges with carbon cathodes
| Schultrich, Bernd:
Tetrahedrally Bonded Amorphous Carbon Films I : Basics, Structure and Preparation
Berlin: Springer, 2018 (Springer series in materials science 263)
ISBN: 978-3-662-55925-3 (Print)
ISBN: 978-3-662-55927-7 (Online)
DOI: 10.1007/978-3-662-55927-7
S.373-452 |
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| Englisch |
| Aufsatz in Buch |
| Fraunhofer IWS () |
Abstract
The fundamental requirement for the growth of ta-C structures, a rather high kinetic energy of the film forming carbon species, can be fulfilled with excellent control by the Mass Selected Ion Beam Deposition.