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Growth of ta-C films

 
: Schultrich, Bernd

:

Schultrich, Bernd:
Tetrahedrally Bonded Amorphous Carbon Films I : Basics, Structure and Preparation
Berlin: Springer, 2018 (Springer series in materials science 263)
ISBN: 978-3-662-55925-3 (Print)
ISBN: 978-3-662-55927-7 (Online)
DOI: 10.1007/978-3-662-55927-7
S.299-370
Englisch
Aufsatz in Buch
Fraunhofer IWS ()

Abstract
The understanding of the growth of tetrahedrally bonded amorphous carbon is based on the experimentally selected conditions for the preparation of ta-C films: sufficient high kinetic energy of the impinging carbon particles of at least some ten electron-volt and sufficient low temperatures, usually below 150 °C (see Chap. 7).

: http://publica.fraunhofer.de/dokumente/N-519480.html