In situ and ex situ spectrophotometric characterization of single- and multilayer-coatings II: Experimental technique and application examples

In the previous chapter, the theoretical background for characterization of single layer and multilayer coatings has been outlined. In this chapter, important aspects for the underlying experimental techniques will presented. Furthermore, we demonstrate the application of different dispersion models for characterization of uncoated substrates, single layer coatings of dielectrics, semiconductors, metals and organic coatings. Thereby, the focus has been set to the β_do model. Finally, the interplay of in situ and ex situ spectroscopy will be demonstrated for a multilayer antireflection coating (V-coating).