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In situ and ex situ spectrophotometric characterization of single- and multilayer-coatings II: Experimental technique and application examples

	Stenzel, O.: Optical characterization of thin solid films Cham: Springer International Publishing, 2018 (Springer Series in Surface Sciences 64) ISBN: 978-3-319-75324-9 (Print) ISBN: 978-3-319-75325-6 (Online) ISBN: 3-319-75324-X S.203-232
	Bilateral Workshop on Optical Coating Characterization <2016, Brno>

	Englisch
	Konferenzbeitrag
	Fraunhofer IOF ()

Abstract
In the previous chapter, the theoretical background for characterization of single layer and multilayer coatings has been outlined. In this chapter, important aspects for the underlying experimental techniques will presented. Furthermore, we demonstrate the application of different dispersion models for characterization of uncoated substrates, single layer coatings of dielectrics, semiconductors, metals and organic coatings. Thereby, the focus has been set to the Î² do model. Finally, the interplay of in situ and ex situ spectroscopy will be demonstrated for a multilayer antireflection coating (V-coating).

: http://publica.fraunhofer.de/dokumente/N-516042.html