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Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments

 
: Eifler, M.; Hering, J.; Freymann, G. von; Seewig, J.

:
Volltext urn:nbn:de:0011-n-5101409 (4.3 MByte PDF)
MD5 Fingerprint: b28d40f511a041f8a4251de5bcfa55f1
Erstellt am: 28.9.2018


Optics Express 26 (2018), Nr.13, S.16609-16623
ISSN: 1094-4087
Deutsche Forschungsgemeinschaft DFG
SFB 926; MICOS
Englisch
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer ITWM ()

Abstract
Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.

: http://publica.fraunhofer.de/dokumente/N-510140.html