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Decreasing the actuation voltage in electrowetting on dielectric with thin and micro-structured dielectric

 
: Türk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger

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Institute of Electrical and Electronics Engineers -IEEE-:
14th Conference on Ph.D. Research in Microelectronics and Electronics, PRIME 2018 : July 2nd - July 5th, 2018, Prague, Czech Republic
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5386-5387-6
ISBN: 978-1-5386-5386-9
ISBN: 978-1-5386-5388-3
S.205-208
Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) <14, 2018, Prague>
Deutsche Forschungsgemeinschaft DFG
VO 802/4-1; EWALD
Elektrobenetzung mit Atomlagenabscheidung
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
electrowetting-on-dielectric (EWOD); micro-structuring; actuation voltage; atomic layer deposition (ALD)

Abstract
This work presents the analysis of the minimum actuation voltage Vmin for droplet actuation with electrowetting on dielectric (EWOD). First, the fundamentals of electrowetting are described. In the second chapter, the impact on the actuation voltage in EWOD is shown by a dielectric deposited with atomic layer deposition (ALD) and micro-structured surface. In the last part, results of a simulation with COMSOL Multiphysics® are presented to verify the hypothesis and a short discussion about the results is given.

: http://publica.fraunhofer.de/dokumente/N-506547.html