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Mesoporous TiO2 thin films prepared from hydrothermally treated precursor powder sols

: Herbig, Bettina; Löbmann, Peer


Journal of Sol-Gel Science and Technology 87 (2018), Nr.2, S.292-298
ISSN: 0928-0707
ISSN: 1573-4846
Fraunhofer ISC ()
Hydrothermalsynthese; precursor; Dünnfilm; Titandioxid (TiO2)

Two series of TiO2 thin films were prepared based on soluble precursor powders: The first run originated directly from an alcohol-based coating solution whereas for the second batch the aqueous precursor powder sol had previously undergone a hydrothermal treatment. The respective microstructures were characterized by electron microscopy, the phase evolution was monitored by X-ray diffraction. Ellipsometric porosimetry (EP) was employed to reveal changes of porosity and pore size induced by thermal treatment of the films.