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Electrical micro-heating structures on glass created by laser ablation

: Neitz, Marcel; Böttger, Gunnar; Queisser, Marco; Arndt-Staufenbiel , Norbert; Schneider-Ramelow, Martin


Neuenschwander, B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII : SPIE LASE, 27 January - 1 February 2018
Bellingham, WA: SPIE, 2018 (Proceedings of SPIE 10519)
ISBN: 978-1-5106-1523-6
Paper 105190G, 7 S.
Conference "Laser Applications in Microelectronic and Optoelectronic Manufacturing" (LAMOM) <23, 2018, San Francisco/Calif.>
LASE Conference <2018, San Francisco/Calif.>
Fraunhofer IZM ()

Addressing the need for fast design cycles and tooling in the assembly of small structures, a flexible approach to overcome the obstacles of current time-consuming manufacturing methods is needed. Additionally, assembly of small and especially optical structures is often limited concerning the application and curing of adhesives used for joining. Local heating structures can be seen as an ideal way of solving this issue. This paper shows the simulation and flexible laser structuring of miniaturized heating. Mask-based large panel physical vapor deposition (PVD) processes and subsequent laser processing appear to be economical and flexible, and are compared to standard panel level lithography processes.