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Ion implantation of polypropylene films for the manufacture of thin film capacitors

: Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.


Lee, W.-H. ; Institute of Electrical and Electronics Engineers -IEEE-:
21st International Conference on Ion Implantation Technology, IIT 2016 : Tainan, Taiwan, 26-30 September 2016
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-2024-9
ISBN: 978-1-5090-2025-6
ISBN: 978-1-5090-2023-2
ISBN: 978-1-5090-2022-5
International Conference on Ion Implantation Technology (IIT) <21, 2016, Tainan>
Fraunhofer IISB ()

This paper shows that ion implantation into polypropylene films can be used to improve the reliability of thin film capacitors. Hereby, the effect of a significantly reduced water vapor permeability is used. Thin film capacitors of implanted and non-implanted films were manufactured and characterized electrically. Especially climate tests show that implanted film capacitors maintain their capacitance and dissipation factor for a significantly longer period of time.