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Modern coating and annealing technologies for advanced multifunctional layer stacks

: Preußner, Thomas; Junghähnel, Manuela; Westphalen, Jasper; Täschner, Kerstin

Schottner, G. ; International Council for Coatings on Glass e.V. -ICCG-; Fraunhofer-Institut für Silicatforschung -ISC-, Würzburg; Vincentz Network GmbH & Co. KG, Hannover:
Advanced coatings for large-area or high-volume products. The 12th International Conference on Coatings on Glass and Plastics : ICCG 12. CD-ROM : June 11-15, 2018, Conference Center Würzburg, Germany
Würzburg: Fraunhofer ISC, 2018
S.38-40 (Session 1)
International Conference on Coatings on Glass and Plastics (ICCG) <12, 2018, Würzburg>
Fraunhofer FEP ()
flash lamp annealing; PVD; PECVD; Filter; sputtering; optical modelling

In the last years, the demands for the quality of layers and layer stacks were steadily increasing. In order to optimize the coating processes, the process control needs to be increasingly precise. Consequently, optimized feedback loops, target developments and process control improvements are important factors for the development of innovative thin film products. On the other hand economic factors of e.g. material choice, the efficiency of material utilization and the energy efficiency of the processes are the basis for a cost-efficient high-volume production. As examples MagPECVD processes for the efficient deposition of low stress silica films, Flash lamp annealing (FLA) as an economic post treatment technology and multilayer filters sputtered with high precision requirements will be discussed.