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Fraunhofer uses semiconductor process exhaust in fuel cell

: Steinberger, Michael; Barrett, Steve


Fuel cells bulletin (2017), Nr.8, S.13
ISSN: 1464-2859
ISSN: 1873-717X
Bayerischen Staatsministerium für Wirtschaft und Medien, Energie und Technologie StMWi
20.2-3410-2-6-3; SEEDs
Fraunhofer IISB ()

Researchers at the Fraunhofer Institute for Integrated Systems and Device Technology IISB in Erlangen, Germany have developed a PEM fuel cell power generation system that converts hydrogen-rich exhaust gas from a semiconductor manufacturing facility into electrical energy. The new approach, developed within the framework of the Bavarian energy research project SEEDs, conserves resources and increases the overall efficiency of semiconductor production.