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2006
Journal Article
Titel
Research on the power consumption of gas-sensor array
Abstract
The power consumption of battery-driven micro-machined gas sensors is more critical. To research the power consumption of gas sensors, often the front-side of the sensor array has fabricated, the back-side of the sensor is etched to form an air gap between substrate and housing. The power consumption of etched and unetched sensors can be compared. The result shows that the etched sensor has lower power consumption.