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Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering

: Trost, M.; Schröder, S.; Yulin, S.; Duparre, A.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2016 : 19-24 June 2016, Tucson, Arizona, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-13-2
Paper TA.2
Conference" Optical Interference Coatings" (OIC) <2016, Tucson/Ariz.>
Fraunhofer IOF ()

The roughness evolution as well as its impact on the light scattering properties of La/B4C and Ru/B4C multilayer coatings for a wavelength of 6.7 nm are studied by analyzing multilayer stacks with different numbers of layers.